_vxfiVspCacheFile_0.tmp??

Don't hesitate to post back if you can't get it to work
I'll try to keep an eye on this thread.

Here is a step-by-step explanation on how to proceed.
(Be sure to use the latest Process Explorer version, which is 10.06 at this time)

1) Launch Process Explorer, and hit CTRL+F to open the "find handle or dll" dialog

2) Type a part of the name of the file you're searching. I suppose "vxfiVsp" will do it, and click on "Search"

3) You should have a list of processes that have a handle open on this file, and prevent you from deleting it.

4) Double click on a line of the results, you should quit the dialogbox, and have a line highlighted in the lower part of Process Explorer, with type "File".

5) Right click on this line, and select "close handle". Be aware that it MAY lead to application crash (the one selected on the upper part of Process Explorer, which is the app that have a handle open on this file), because closing a handle this way is NOT friendly to the application.

6) Repeat this for each line you have on the dialog box "search for handle or dll".

7) You should now be able to delete the file.